The (Part Number AX7651-2) is a remote plasma source (RPS) commonly used in semiconductor manufacturing for cleaning process chambers. Manuals for the Astron series generally cover safety protocols, installation, and technical operation for atomic fluorine generation. Core Functionality
: Never remove equipment covers while power is connected; high internal voltages can cause fatal injury. If you need the exact pin-out diagrams troubleshooting error codes , I can help you find them if you specify which control interface (e.g., DeviceNet, RS-232, or Discrete I/O) you are using. mks astron 2l manual
: 187 to 228 VAC, 50/60 Hz, 50A, 3-phase power. Installation & Utility Requirements Cooling : High-capacity water cooling is required. MKS Astron 2L The (Part Number AX7651-2) is
If the unit fails to ignite, check the cooling water flow and temperature interlocks first. The system will automatically shut down if flow drops below the safety threshold. Finding the Full Manual If you need the exact pin-out diagrams troubleshooting
: Once the plasma is ignited, the primary process gas (typically cap N cap F sub 3 ) can be introduced, and the can be removed. Process Parameters Flow Rates : Post-ignition flow typically supports up to (standard liters per minute) of cap N cap F sub 3 Operating Pressure
In the world of semiconductor fabrication, downtime for chamber cleaning is the enemy of throughput. The MKS ASTRON® 2L
Never exhaust ozone directly into the workspace; use an ozone destruct unit.